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Title
静電誘導吸着具及び静電誘導吸着方法 
Author
Shigeki SAITO, TAKESHI KIKUTANI.  
Kind
Patent 
Status
Registered 
Applicant
国立大学法人東京工業大学.  
Filing Date
2006/12/14
Application Number
特願2006-336511
Unexamined Application Date
2008/07/03
Publication Number
特開2008-154301
Registration Date
2012/04/06
Registration Number
特許第4961554号

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