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Patent Information


Title
ペロブスカイト構造酸化物薄膜の作製方法 
Author
HIROSHI FUNAKUBO.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学, キャノンオプトロン株式会社.  
Filing Date
2009/09/07
Application Number
特願2009-206439
Unexamined Application Date
2011/03/24
Publication Number
特開2011-057475

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