Tokyo Tech Research Repository (T2R2)

Patent Information

Title

位相差透過型電子顕微鏡用位相板及びその製造方法

Author

Takumi Sannomiya.

Kind

Patent

Status

Published

Applicant

国立大学法人東京工業大学.

Filing Date

2012/04/10

Application Number

特願2012-089090

Unexamined Application Date

2013/10/24

Publication Number

特開2013-218906

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