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Patent Information
Title
シリコン系薄膜及びその製造方法
Author
HIROSHI FUNAKUBO
,
Mao Kurokawa
.
Kind
Patent
Status
Registered
Applicant
国立大学法人東京工業大学, 東ソー株式会社.
Filing Date
2018/03/30
Application Number
特願2018-068515
Unexamined Application Date
2018/11/08
Publication Number
特開2018-174325
Registration Date
2022/05/19
Registration Number
特許第7076096号
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