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Patent Information
Title
双極型静電チャックモジュールおよびその製造方法
Author
Shigeki SAITO
,
Kento Kawano
,
Yosuke Tajiri
,
KUNIO TAKAHASHI
.
Kind
Patent
Status
Registered
Applicant
国立大学法人東京工業大学.
Filing Date
2017/02/28
Application Number
特願2018-503354
Unexamined Application Date
2018/12/27
Publication Number
再表2017/150574
Registration Date
2021/03/04
Registration Number
特許第6846821号
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