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Patent Information
Title
圧電体膜の製造方法
Author
HIROSHI FUNAKUBO
,
Akinori Tateyama
,
TakaoShimizu
,
yuichiro orino
,
Minoru Kuribayashi Kurosawa
,
Takahisa Shiraishi
.
Kind
Patent
Status
Published
Applicant
国立大学法人東京工業大学, 学校法人上智学院, 国立大学法人東北大学, 国立大学法人山梨大学.
Filing Date
2019/01/10
Application Number
特願2019-564746
Unexamined Application Date
2021/03/11
Publication Number
再表2019/139100
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