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Patent Information
Title
面状アクチュエータ、これを用いた搬送装置及び移動装置、並びに製造方法
Author
Hideyuki Tsukagoshi
,
Takahiro Kasahara
,
Masahiro Watanabe
.
Kind
Patent
Status
Registered
Applicant
国立大学法人東京工業大学.
Filing Date
2020/01/31
Application Number
特願2020-015073
Unexamined Application Date
2021/08/26
Publication Number
特開2021-121751
Registration Date
2023/11/06
Registration Number
特許第7378786号
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