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Patent Information


Title
静電吸着デバイス及び静電吸着方法 
Author
Shigeki SAITO, Tomohiro Ryo, Yuki Taoka, Sanchuan Xu.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京工業大学.  
Filing Date
2022/08/17
Application Number
PCT/JP2022/031126
Unexamined Application Date
2023/02/23
Publication Number
WO 2023/022180

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