Author,Title,Kind,Status,ApplicantName,ApplicationDate,ApplicationNumber,PublicationDate,PublicationNumber,RegistrationDate,RegistrationNumber
"Shigeki SAITO,Tomohiro Ryo,Yuki Taoka,Sanchuan Xu","静電吸着デバイス及び静電吸着方法","Patent","Published","国立大学法人東京工業大学","2022/08/17","PCT/JP2022/031126","2023/02/23","WO 2023/022180",,
"YUKIO TAKEDA,Reiji Ando,Shigeki SAITO,Yusuke Sugahara,Yuki Taoka,Kotaro Hoshiba","形状適応機構及び形状適応装置","Patent","Published","国立大学法人東京工業大学","2022/07/21","特願2022-116483","2023/03/03","特開2023-029240",,
"Shigeki SAITO,Kento Kawano,Yosuke Tajiri,KUNIO TAKAHASHI","双極型静電チャックモジュールおよびその製造方法","Patent","Registered","国立大学法人東京工業大学","2017/02/28","特願2018-503354","2018/12/27","再表2017/150574","特許第6846821号","2021/03/04"
"Shigeki SAITO,TAKESHI KIKUTANI","静電誘導吸着具及び静電誘導吸着方法","Patent","Registered","国立大学法人東京工業大学","2006/12/14","特願2006-336511","2008/07/03","特開2008-154301","特許第4961554号","2012/04/06"
"Shigeki SAITO,KUNIO TAKAHASHI,Kenichi J Obata","液体パターン形成方法及び形成装置","Patent","Published","国立大学法人東京工業大学","2005/04/27","特願2005-129893","2006/11/09","特開2006-310470",,