発明者,発明の名称,種別,状態,出願人,出願日,出願番号,公開日,公開番号,登録日,登録番号 "堀岡一彦,川崎 朋晃,袖子田 竜也 ,桑原 一 ","プラズマ光源","特許","登録","国立大学法人東京工業大学, 株式会社IHI","2016/08/15","特願2016-159326","2018/02/22","特開2018-028570","特許第6663823号","2020/02/19" "堀岡一彦,桑原 一","LPP方式のEUV光源とその発生方法","特許","登録","国立大学法人東京工業大学, 株式会社IHI","2014/07/25","特願2014-152154","2014/10/30","特開2014-207246","特許第5930553号","2016/05/13" "堀岡一彦,増田政史,桑原 一","プラズマ光源","特許","登録","国立大学法人東京工業大学, 株式会社IHI","2013/06/03","特願2013-116727","2014/12/15","特開2014-235886","特許第6111145号","2017/03/17" "堀岡一彦,増田政史,桑原 一","プラズマ光源","特許","登録","国立大学法人東京工業大学, 株式会社IHI","2013/06/03","特願2013-116730","2014/12/15","特開2014-235887","特許第6126466号","2017/04/14" "堀岡一彦,桑原 一","LPP方式のEUV光源とその発生方法","特許","公開","国立大学法人東京工業大学, 株式会社IHI","2009/09/01","特願2009-201433","2011/03/17","特開2011-054376",, "細貝 知直,堀田栄喜,堀岡一彦,横山 拓馬","プラズマ発生方法およびこのプラズマ発生方法を用いた極端紫外光光源装置","特許","公開","国立大学法人東京工業大学, ウシオ電機株式会社","2009/03/05","特願2009-051968","2010/09/16","特開2010-205651",, "堀岡一彦,桑原 一","プラズマ光源とプラズマ光発生方法","特許","登録","国立大学法人東京工業大学, 株式会社IHI","2008/12/18","特願2008-322526","2010/07/01","特開2010-147231","特許第5479723号","2014/02/21" "細貝 知直,堀岡一彦,関 匡平,溝越 寛","極端紫外光光源装置および極端紫外光発生方法","特許","公開","国立大学法人東京工業大学, ウシオ電機株式会社","2007/10/17","特願2007-270121","2009/05/07","特開2009-099390",, "細貝 知直,堀岡一彦,溝越 寛,横山 拓馬","極端紫外光光源装置および極端紫外光発生方法","特許","公開","国立大学法人東京工業大学, ウシオ電機株式会社","2007/10/01","特願2007-257439","2008/11/06","特開2008-270149",, "細貝 知直,堀岡一彦,関 匡平,横山 拓馬","極端紫外光発生方法及び極端紫外光光源装置","特許","公開","国立大学法人東京工業大学, ウシオ電機株式会社","2007/10/01","特願2007-257442","2009/04/23","特開2009-087807",, "堀岡一彦,マスナヴィ マジッド,堀田栄喜","プラズマから極端紫外光を発生する光源","特許","登録","国立大学法人東京工業大学","2006/04/28","特願2007-528244","2008/12/08","再表2006/120942","特許第5114711号","2012/10/26" "堀田栄喜,渡邊正人,沖野晃俊,堀岡一彦","極紫外光発生装置","特許","公開","国立大学法人東京工業大学","2004/08/10","特願2004-233957","2006/02/23","特開2006-054270",,