Atomic Layer-by-Layer MOCVD of Complex Metal Oxides and In Situ Process Monitoring

Publication Information

Title

Japanese:
English:	Atomic Layer-by-Layer MOCVD of Complex Metal Oxides and In Situ Process Monitoring

Author

Japanese:	Shuu'ichirou Yamamoto, Shunri Oda.
English:	Shuu'ichirou Yamamoto, Shunri Oda.

Language

English

Journal/Book name

Japanese:
English:	Chemical Vapor Deposition

Volume, Number, Page

Vol. 7 No. 1 pp. 7-18

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: