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Title
Japanese:ECRスパッタ法により形成したHfOxNy薄膜の熱処理に関する検討 
English: 
Author
Japanese: 内川偉史, 山中剛, 大見俊一郎, 酒井徹志.  
English: 内川偉史, 山中剛, 大見俊一郎, 酒井徹志.  
Language Japanese 
Journal/Book name
Japanese:第51回応用物理学関係連合講演会 
English: 
Volume, Number, Page Vol. 2        pp. 883
Published date 2004 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
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