Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch

Publication Information

Title

Japanese:
English:	Mathematical modeling and design of a novel 2-DOF micro attraction actuator for a micro optical switch

Author

Japanese:	Daiki KAMIYA, Saeed BAGHERI, Mikio HORIE.
English:	Daiki KAMIYA, Saeed BAGHERI, Mikio HORIE.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE; MEMS, MOEMS and Micromachining

Volume, Number, Page

No. 5455 pp. 137-146

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	France

DOI