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Publication Information
Title
Japanese:
English:
Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
Author
Japanese:
宋仁皓
,
Smruti Mohanty
,
渡邊正人
,
河村徹
,
沖野晃俊
,
堀岡一彦
,
堀田 栄喜
.
English:
INHO SONG
,
Smruti Mohanty
,
MASATO WATANABE
,
Tohru Kawamura
,
AKITOSHI OKINO
,
KAZUHIKO HORIOKA
,
HOTTA Eiki
.
Language
English
Journal/Book name
Japanese:
English:
J.Plasma Fusion Res.
Volume, Number, Page
Vol. 81 No. 9 pp. 647-648
Published date
Sept. 1, 2005
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.