Capacitance-Voltage Study of a-SiCN:H / Si Interfaces Fabricated by Hotwire Chemical Vapor Deposition Using Hexamethyldisilazane

Publication Information

Title

Japanese:
English:	Capacitance-Voltage Study of a-SiCN:H / Si Interfaces Fabricated by Hotwire Chemical Vapor Deposition Using Hexamethyldisilazane

Author

Japanese:	Amornrat Limmanee, Michio Otsubo, Takehiko Sato, Shinsuke Miyajima, Tatsuro Watahiki, Adash Sandhu, Akira Yamada, Makoto Konagai.
English:	Amornrat Limmanee, Michio Otsubo, Takehiko Sato, Shinsuke Miyajima, Tatsuro Watahiki, Adash Sandhu, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	15th International Photovoltaic Science and Engineering Conference

Volume, Number, Page

pp. *

Published date

Oct. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	15th International Photovoltaic Science and Engineering Conference

Conference site

Japanese:
English:	Shanghai