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Title
Japanese:ガスソースMBE法を用いたSiバッファ上への歪緩和Si1-yCy膜の作製 
English: 
Author
Japanese: 石原英恵　村野仁彦　綿引達郎　山田明　小長井誠.  
English: 石原英恵　村野仁彦　綿引達郎　山田明　小長井誠.  
Language Japanese 
Journal/Book name
Japanese:第52回応用物理学関係連合講演会 
English: 
Volume, Number, Page         pp. *
Published date Apr. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:第52回応用物理学関係連合講演会 
English: 
Conference site
Japanese:埼玉 
English: 

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