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Title
Japanese:研磨プロセスを用いたMEMS静電駆動アクチュエータの試作 
English: 
Author
Japanese: 柚場 誉嗣, 岩田 英樹, 神谷 大揮, 堀江三喜男.  
English: 柚場 誉嗣, 岩田 英樹, 神谷 大揮, 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese: 
English:2005年度精密工学会秋季大会学術講演論文集 
Volume, Number, Page     No. CD-ROM    pp. 999-1000
Published date Sept. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese:京都大学 
English: 

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