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Title
Japanese:微細形状測定センサの不確かさ評価のための動特性の把握 
English: 
Author
Japanese: 原　精一郎, 小林　義信, 笹島　和幸.  
English: Seiichiro Hara, Yoshinobu Kobayashi, Kazuyuki Sasajima.  
Language Japanese 
Journal/Book name
Japanese:日本設計工学会　研究発表講演会講演論文集 
English:Japan Society for Design Engineering 
Volume, Number, Page         pp. 43-44
Published date 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:日本設計工学会　平成17年度春季大会 
English: 
Conference site
Japanese:東京理科大学 
English: 

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