Structural Defects and Electrical Cunductivity in Nanocrystalline SiC:H Films Doped with Boron and  Grown by Photostimulated Chemical-Vapor Deposition

Publication Information

Title

Japanese:
English:	Structural Defects and Electrical Cunductivity in Nanocrystalline SiC:H Films Doped with Boron and Grown by Photostimulated Chemical-Vapor Deposition

Author

Japanese:	O. I. Shevaleevskiy, S.Y. Myong, K.S. Lim, 宮島晋介, M. Konagai.
English:	O. I. Shevaleevskiy, S.Y. Myong, K.S. Lim, S. Miyajima, M. Konagai.

Language

English

Journal/Book name

Japanese:
English:	Semiconductors

Volume, Number, Page

Vol. 39 No. 2005 pp. 741-743

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: