Sheet Plasma Production by means of RF Magnetron Discharges

Publication Information

Title

Japanese:
English:	Sheet Plasma Production by means of RF Magnetron Discharges

Author

Japanese:	奥野喜裕, H.Ishikura, H.Fujita.
English:	Y.Okuno, H.Ishikura, H.Fujita.

Language

English

Journal/Book name

Japanese:
English:	Review of Scientific Instruments

Volume, Number, Page

Vol. 63 No. 7 pp. 3725-3728

Published date

July 1992

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: