Modulation of Electron Velocity Distribution Function by Moving Cathode Sheath in a Low-Pressure RF Dsicharge

Publication Information

Title

Japanese:
English:	Modulation of Electron Velocity Distribution Function by Moving Cathode Sheath in a Low-Pressure RF Dsicharge

Author

Japanese:	奥野喜裕, Y.Ohtsu, H.Fujita.
English:	Y.Okuno, Y.Ohtsu, H.Fujita.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 31 No. 4 pp. 1194-1198

Published date

Apr. 1992

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: