Potential Structure in Silane Radio-Frequency Discharge Containing Particles

Publication Information

Title

Japanese:
English:	Potential Structure in Silane Radio-Frequency Discharge Containing Particles

Author

Japanese:	奥野喜裕, H.Fujita, M.Shiratani, Y.Watanabe.
English:	Y.Okuno, H.Fujita, M.Shiratani, Y.Watanabe.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

Vol. 63 No. 13 pp. 1748-1750

Published date

Sept. 1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: