Observation of Radio-Frequency Discharges at Various Driving Frequencies

Publication Information

Title

Japanese:
English:	Observation of Radio-Frequency Discharges at Various Driving Frequencies

Author

Japanese:	Y.Ohtsu, 奥野喜裕, H.Fujita.
English:	Y.Ohtsu, Y.Okuno, H.Fujita.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 73 No. 5 pp. 155-2159

Published date

Mar. 1993

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: