Production of Large Diameter Microwave Plasma using Annular Slot Antenna

Publication Information

Title

Japanese:
English:	Production of Large Diameter Microwave Plasma using Annular Slot Antenna

Author

Japanese:	T.Ikushima, 奥野喜裕, H.Fujita.
English:	T.Ikushima, Y.Okuno, H.Fujita.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

Vol. 64 No. 1 pp. 25-27

Published date

Jan. 1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: