Pick and Place Operation of a Micro Object with High Reliability and Precision based on Micro Physics under SEM

Publication Information

Title

Japanese:
English:	Pick and Place Operation of a Micro Object with High Reliability and Precision based on Micro Physics under SEM

Author

Japanese:	齋藤滋規, Hideki Miyazaki, Tomomasa Sato.
English:	Shigeki Saito, Hideki Miyazaki, Tomomasa Sato.

Language

English

Journal/Book name

Japanese:
English:	Proc. 1999 IEEE International Conference on Robotics and Automation

Volume, Number, Page

No. 3 pp. 2736-2743

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: