Micro Object Handling under SEM by Vision-based Automatic Control

Publication Information

Title

Japanese:
English:	Micro Object Handling under SEM by Vision-based Automatic Control

Author

Japanese:	Takeshi Kasaya, Hideki Miyazaki, 齋藤滋規, Tomomasa Sato.
English:	Takeshi Kasaya, Hideki Miyazaki, Shigeki Saito, Tomomasa Sato.

Language

English

Journal/Book name

Japanese:
English:	Proc. 1998 SPIE Microrobotics and Micromanipulation

Volume, Number, Page

Vol. 3519 pp. 181-192

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: