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Title
Japanese: 
English:Electrostatic Comb-drive Actuators made of Polyimide for Actuating Micromotion Convert Mechanisms 
Author
Japanese: Daiki KAMIYA, Takuji HAYAMA, Mikio HORIE.  
English: Daiki KAMIYA, Takuji HAYAMA, Mikio HORIE.  
Language English 
Journal/Book name
Japanese: 
English:J. of Microsystem Technologies 
Volume, Number, Page Vol. 5        pp. 161~165
Published date 1999 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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