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Publication Information
Title
Japanese:
English:
Electrostatic Comb-drive Actuators made of Polyimide for Actuating Micromotion Convert Mechanisms
Author
Japanese:
Daiki KAMIYA, Takuji HAYAMA,
Mikio HORIE
.
English:
Daiki KAMIYA, Takuji HAYAMA,
Mikio HORIE
.
Language
English
Journal/Book name
Japanese:
English:
J. of Microsystem Technologies
Volume, Number, Page
Vol. 5 pp. 161~165
Published date
1999
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Institute of Science Tokyo All rights reserved.