Electrostatic Comb-drive Actuators made of Polyimide for Actuating Micromotion Convert Mechanisms

Publication Information

Title

Japanese:
English:	Electrostatic Comb-drive Actuators made of Polyimide for Actuating Micromotion Convert Mechanisms

Author

Japanese:	Daiki KAMIYA, Takuji HAYAMA, Mikio HORIE.
English:	Daiki KAMIYA, Takuji HAYAMA, Mikio HORIE.

Language

English

Journal/Book name

Japanese:
English:	J. of Microsystem Technologies

Volume, Number, Page

Vol. 5 pp. 161～165

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: