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Title
Japanese:シリコン基板表面の親疎水現象とマイクロマシンへの応用に関する研究 
English: 
Author
Japanese: 神谷　大揮, 堀江三喜男.  
English: 神谷　大揮, 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese:1999年度精密工学会春季大会学術講演会講演論文集 
English: 
Volume, Number, Page         pp. 304
Published date 1999 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
Japanese: 
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