Atomic layer controlled metalorganic chemical vapor deposition of superconducting YBa2Cu3OX films

Publication Information

Title

Japanese:
English:	Atomic layer controlled metalorganic chemical vapor deposition of superconducting YBa₂Cu₃O_X films

Author

Japanese:	Shunri Oda, Hideaki Zama, Shuu'ichirou Yamamoto.
English:	Shunri Oda, Hideaki Zama, Shuu'ichirou Yamamoto.

Language

English

Journal/Book name

Japanese:
English:	Journal of Crystal Growth

Volume, Number, Page

Vol. 145 pp. 232-236

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: