In situ Growth Monitoring during Metalorganic Chemical Vapor Deposition of YBa2Cu3OX Thin Films by Spectroscopic Ellipsometry

Publication Information

Title

Japanese:
English:	In situ Growth Monitoring during Metalorganic Chemical Vapor Deposition of YBa₂Cu₃O_X Thin Films by Spectroscopic Ellipsometry

Author

Japanese:	Shuu'ichirou Yamamoto, Satoshi Sugai, Yasunari Matsukawa, Akio Sengoku, Hiroshi Tobisaka, Takeo Hattori, Shunri Oda.
English:	Shuu'ichirou Yamamoto, Satoshi Sugai, Yasunari Matsukawa, Akio Sengoku, Hiroshi Tobisaka, Takeo Hattori, Shunri Oda.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 38 pp. L632-L635

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: