A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4mm in diameter and 5.0 mm long stator transducer)

Publication Information

Title

Japanese:
English:	A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4mm in diameter and 5.0 mm long stator transducer)

Author

Japanese:	T. Morita, M. K. Kurosawa, T. Higuchi .
English:	T. Morita, M. K. Kurosawa, T. Higuchi .

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A

Volume, Number, Page

Vol. 83 pp. 225-230

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: