A flat type touch probe sensor using PZT thin film vibrator

Publication Information

Title

Japanese:
English:	A flat type touch probe sensor using PZT thin film vibrator

Author

Japanese:	T. Kanda, T. Morita, M. K. Kurosawa, T. Higuchi.
English:	T. Kanda, T. Morita, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Sensors and Actuators A

Volume, Number, Page

Vol. 83 pp. 67-75

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: