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Title
Japanese:高密度HDDのための浮上量検出用マイクロ静電容量センサ 
English: 
Author
Japanese: 金　金光, 堀江三喜男.  
English: 金　金光, 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese:日本機械学会2000年度年次大会講演論文集 
English: 
Volume, Number, Page Vol. II    No. 00-1    pp. 169-170
Published date 2000 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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