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Title
Japanese:シリコン基板表面のぬれの変化とマイクロマシンへの応用  
English: 
Author
Japanese: 神谷　大揮, 堀江三喜男.  
English: 神谷　大揮, 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese:日本IFToMM会議シンポジウム前刷集(第６回)  
English: 
Volume, Number, Page         pp. 69-74
Published date 2000 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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