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Title
Japanese:マルチ入出力光スイッチ用大角変位2自由度マイクロミラー 
English: 
Author
Japanese: 神津 岳人, 神谷大揮, 堀江三喜男.  
English: 神津 岳人, 神谷大揮, 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese:日本機械学会関東支部第7期総会講演会講演論文集 
English: 
Volume, Number, Page         pp. 149
Published date 2001 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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