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Title
Japanese: 
English:Dynamics of Micro-object Operation Considering the Adhesive Effect under an SEM 
Author
Japanese: 齋藤 滋規, Hideki T. Miyazaki, Tomomasa Sato, Kunio Takahashi, Tadao Onzawa.  
English: Shigeki Saito, Hideki T. Miyazaki, Tomomasa Sato, Kunio Takahashi, Tadao Onzawa.  
Language English 
Journal/Book name
Japanese: 
English:Proc. SPIE Photonics Boston Intelligent Systems and Advanced Manufacturing 2001 
Volume, Number, Page         pp. 12-23
Published date 2001 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1117/12.444134

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