Epitaxial Growth of Si<sub>1-y</sub>C<sub>y</sub> Film by Low Temperature Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Epitaxial Growth of Si_1-yC_y Film by Low Temperature Chemical Vapor Deposition

Author

Japanese:	Syuhei YAGI, Katsuya ABE, Takashi OKABAYASHI, Akira YAMADA, Makoto KONAGAI.
English:	Syuhei YAGI, Katsuya ABE, Takashi OKABAYASHI, Akira YAMADA, Makoto KONAGAI.

Language

English

Journal/Book name

Japanese:
English:	First International WorkShop on New Group IV (Si-Ge-C) Semiconductors -Control of Properties and Applications to Ultrahigh Speed and Opto-Electronic Devices

Volume, Number, Page

pp. IV-01

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: