Nano-Oxidation of p-GaAs with an Atomic Force Microscope (AFM) Using Pulsed Voltage

Publication Information

Title

Japanese:
English:	Nano-Oxidation of p-GaAs with an Atomic Force Microscope (AFM) Using Pulsed Voltage

Author

Japanese:	Yuichi MATSUZAKI, Shigeki HASUI, Shin-ya KAMADA, Akira YAMADA, Makoto KONAGAI.
English:	Yuichi MATSUZAKI, Shigeki HASUI, Shin-ya KAMADA, Akira YAMADA, Makoto KONAGAI.

Language

English

Journal/Book name

Japanese:
English:	19th Electronic Materials Symposium

Volume, Number, Page

pp. 27

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: