P-Doping into Strain-Induced Si<sub>1-y</sub>C<sub>y</sub> Epitaxial Films Grown by Low Temperature Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	P-Doping into Strain-Induced Si_1-yC_y Epitaxial Films Grown by Low Temperature Chemical Vapor Deposition

Author

Japanese:	S.Yagi, K.Abe, T.Okabayashi, A.Yamada, M. Konagai.
English:	S.Yagi, K.Abe, T.Okabayashi, A.Yamada, M. Konagai.

Language

English

Journal/Book name

Japanese:
English:	2001 International Confernece on Solid State Devices and Materials

Volume, Number, Page

pp. 484

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: