Characterization of Low Temperature Epitaxial Si and Si<sub>1-y</sub>C<sub>y</sub> Films Grown by Hot Wire Cell Method

Publication Information

Title

Japanese:
English:	Characterization of Low Temperature Epitaxial Si and Si_1-yC_y Films Grown by Hot Wire Cell Method

Author

Japanese:	T.Watahiki, K.Abe, H.Tamura, S.Miyajima, A.Yamada, M.Konagai.
English:	T.Watahiki, K.Abe, H.Tamura, S.Miyajima, A.Yamada, M.Konagai.

Language

English

Journal/Book name

Japanese:
English:	European Material Research Society 2001 Spring Meeting

Volume, Number, Page

pp. D-22

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: