Numerical Analysis of Thermo Resist Enhanced Optical Lithography

Publication Information

Title

Japanese:
English:	Numerical Analysis of Thermo Resist Enhanced Optical Lithography

Author

Japanese:	Kenji AMAYA, Etsutaro AKAGAWA, Dan GELBART, Valentine KARAYASYK.
English:	Kenji AMAYA, Etsutaro AKAGAWA, Dan GELBART, Valentine KARAYASYK.

Language

English

Journal/Book name

Japanese:
English:	Journal of Photopholymer science and Technology

Volume, Number, Page

Vol. 13 No. 3 pp. 441-446

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: