Low temperature epitaxial growth of Si and Si<sub>1-y</sub>C<sub>y</sub> films by hot wire cell method

Publication Information

Title

Japanese:
English:	Low temperature epitaxial growth of Si and Si_1-yC_y films by hot wire cell method

Author

Japanese:	Tatsuro Watahiki, Katsuya Abe, Hajime Tamura, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.
English:	Tatsuro Watahiki, Katsuya Abe, Hajime Tamura, Shinsuke Miyajima, Akira Yamada, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 395 pp. 221-224

Published date

2001

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: