Micro-object Pick and Place Operation under SEM based on Micro-physics

Publication Information

Title

Japanese:
English:	Micro-object Pick and Place Operation under SEM based on Micro-physics

Author

Japanese:	齋藤滋規, Hideki T. Miyazaki, Tomomasa Sato.
English:	Shigeki Saito, Hideki T. Miyazaki, Tomomasa Sato.

Language

English

Journal/Book name

Japanese:
English:	Journal of Robotics and Mechatronics

Volume, Number, Page

Vol. 14 No. 3 pp. 227-237

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: