Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Author

Japanese:	神田岳文, 黒澤実, 樋口俊郎.
English:	T. Kanda, M. K. Kurosawa, T. Higuchi.

Language

English

Journal/Book name

Japanese:
English:	Ultrasonics

Volume, Number, Page

Vol. 40 No. 1-8 pp. 61-65

Published date

May 2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.1016/S0041-624X(02)00091-4

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