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Title
Japanese:マイクロシステム(マイクロマシン,MEMS/MOEMS)とその応用 
English: 
Author
Japanese: 堀江三喜男.  
English: 堀江三喜男.  
Language Japanese 
Journal/Book name
Japanese:日本機械学会,機素潤滑設計部門，第２回機素潤滑設計部門講演会講演論文集 
English: 
Volume, Number, Page     No. 02-12    pp. 7-12
Published date 2002 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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