SEM環境下マイクロマニピュレーションにおける電子線の影響

Publication Information

Title

Japanese:	SEM環境下マイクロマニピュレーションにおける電子線の影響
English:	Effect of Electron Beam Irradiation in Micro-manipulation under Scanning Electron Microscope

Author

Japanese:	名越達彦, 齋藤滋規, 高橋邦夫, 恩澤忠男.
English:	名越達彦, Shigeki SAITO, 高橋邦夫, 恩澤忠男.

Language

Japanese

Journal/Book name

Japanese:
English:	Proc. 9th Symposium on “Microjoining and Assembly Technology in Electronics” (Mate 2003)

Volume, Number, Page

pp. 87-90

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: