Theoretical and Experimental Analyses of C stability in Epitaxial Si<sub>1-y</sub>C<sub>y</sub> Film

Publication Information

Title

Japanese:
English:	Theoretical and Experimental Analyses of C stability in Epitaxial Si_1-yC_y Film

Author

Japanese:	S. Yagi, K. Abe, A. Yamada, M. Konagai.
English:	S. Yagi, K. Abe, A. Yamada, M. Konagai.

Language

English

Journal/Book name

Japanese:
English:	Third International Conference on SiGe(C) Epitaxy and Heterostructures

Volume, Number, Page

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: