Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:	SiH₃CH₃を用いたホットワイヤーセル法による微結晶Si_1-yC_y薄膜の作製
English:

Author

Japanese:	宮島　晋介, 山田　明, 小長井　.
English:	宮島　晋介, 山田　明, 小長井　.

Language

Japanese

Journal/Book name

Japanese:	第63回応用物理学関係連合講演会
English:

Volume, Number, Page

Vol. 25a-ZM-9

Published date

2002

Publisher

Japanese:
English:

Conference name

Japanese:
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Conference site

Japanese:
English:

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