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Title
Japanese: 
English:A Trial Manufacturing of Micromechanism Elements by Use of a Fast Atom Beam Etching Machine 
Author
Japanese: Mikio HORIE, Tomoyuki ISHIBASHI, Daiki KAMIYA.  
English: Mikio HORIE, Tomoyuki ISHIBASHI, Daiki KAMIYA.  
Language English 
Journal/Book name
Japanese: 
English:Micro System Technologies 2003, International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components 
Volume, Number, Page         pp. 334-341
Published date 2003 
Publisher
Japanese: 
English:Micro System Technologies 2003 (International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components),Herbert Reichl(Editor),2003 Franzis Verlag GmbH, 85586 Point, ISBN 3-7723-7020-9 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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