Micro System Technologies 2003, International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components
Volume, Number, Page
pp. 334-341
Published date
2003
Publisher
Japanese:
English:
Micro System Technologies 2003 (International Conference & Exhibition on Micro Electro, Opto, Mechanical Systems and Components),Herbert Reichl(Editor),2003 Franzis Verlag GmbH, 85586 Point, ISBN 3-7723-7020-9