Japanese
Home
Search
Horizontal Search
Publication Search
( Advanced Search )
Patent Search
( Advanced Search )
Research Highlight Search
( Advanced Search )
Researcher Search
Search by Organization
Support
FAQ
T2R2 User Registration
Doctoral thesis registration
Support/Contact
About T2R2
What's T2R2?
Operation Guidance
Leaflets
About file disclosure
Related Links
Tokyo Tech
STAR Search
NII IR Program
Home
>
Help
Publication Information
Title
Japanese:
キャピラリィZピンチ放電プラズマを用いたEUV光源の開発
English:
Author
Japanese:
渡辺正人
, 笠尾哲, 岡本光男, 宋 仁皓, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:
渡辺正人
, 笠尾哲, 岡本光男, 宋 仁皓, 沖野晃俊, 堀岡一彦, 堀田栄喜.
Language
Japanese
Journal/Book name
Japanese:
平成15年電気学会全国大会講演論文集
English:
Volume, Number, Page
Vol. 1 pp. 169
Published date
2003
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.